THÔNG SỐ THIẾT KẾ PHÒNG SẠCH CLASS 1, 10, 100

Basic design and operating considerations

Achievable Class*	1 and 10 (M1.5 and M2.5)	100 (M3.5)
Area per occupant Occupants properly attired Occupant activity Equipment in room Housekeeping	40 m2 Full gowns Minimum Minimum Meticulous	30 m2 Full gowns Minimum Minimum Meticulous
Room pressurized Air changes per hour Air lock	15 Pa 500-600 Yes	15 Pa 500 Yes
Clean air inlets as % of ceiling area Clean air inlet locations Terminal velocity at clean air inlet Return air location	90-100% Ceiling 0.3 – 0.45 m/s Perforated floor	90% Ceiling (wall) 0.3 – 0.45 m/s Low level or floor
		(opposite wall, 0.45 m/s)
Prefilters: – First stage**	30% dust spot efficiency	50% dust spot efficiency
	F5	F5
– Second stage**	95% @ 0.3 µm	90% dust spot efficiency
	H10	F9
Prefilter maintenance and inspection Final filters**	Monthly Min. 99.9995% on 0.12 µm (for Class 10)	Monthly Min. 99.999% @ 0.3 um
	U15	H14
	Min. 99.99995% on 0.12 µm (for Class 1)
	U16
Routine particle count interval	Daily	Weekly